JPH0468279B2 - - Google Patents

Info

Publication number
JPH0468279B2
JPH0468279B2 JP61160608A JP16060886A JPH0468279B2 JP H0468279 B2 JPH0468279 B2 JP H0468279B2 JP 61160608 A JP61160608 A JP 61160608A JP 16060886 A JP16060886 A JP 16060886A JP H0468279 B2 JPH0468279 B2 JP H0468279B2
Authority
JP
Japan
Prior art keywords
core tube
furnace core
quartz glass
furnace
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP61160608A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6317300A (ja
Inventor
Kyoichi Inagi
Hiroshi Kimura
Kazuo Nakamura
Katsuhiko Kenmochi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Quartz Products Co Ltd
Original Assignee
Shin Etsu Quartz Products Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Quartz Products Co Ltd filed Critical Shin Etsu Quartz Products Co Ltd
Priority to JP61160608A priority Critical patent/JPS6317300A/ja
Priority to KR1019870001654A priority patent/KR900003251B1/ko
Publication of JPS6317300A publication Critical patent/JPS6317300A/ja
Publication of JPH0468279B2 publication Critical patent/JPH0468279B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Glass Compositions (AREA)
  • Joining Of Glass To Other Materials (AREA)
JP61160608A 1986-07-08 1986-07-08 石英ガラス製炉芯管 Granted JPS6317300A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP61160608A JPS6317300A (ja) 1986-07-08 1986-07-08 石英ガラス製炉芯管
KR1019870001654A KR900003251B1 (ko) 1986-07-08 1987-02-26 석영유리제 노심관

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61160608A JPS6317300A (ja) 1986-07-08 1986-07-08 石英ガラス製炉芯管

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP5782594A Division JPH0774122A (ja) 1994-03-28 1994-03-28 石英ガラス製の炉芯管
JP5777494A Division JPH0774121A (ja) 1994-03-28 1994-03-28 石英ガラス製炉芯管

Publications (2)

Publication Number Publication Date
JPS6317300A JPS6317300A (ja) 1988-01-25
JPH0468279B2 true JPH0468279B2 (en]) 1992-10-30

Family

ID=15718619

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61160608A Granted JPS6317300A (ja) 1986-07-08 1986-07-08 石英ガラス製炉芯管

Country Status (2)

Country Link
JP (1) JPS6317300A (en])
KR (1) KR900003251B1 (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0614480Y2 (ja) * 1988-04-26 1994-04-13 信越石英株式会社 半導体熱処理装置
JP3412735B2 (ja) * 1996-08-07 2003-06-03 株式会社山形信越石英 ウエーハ熱処理装置
JPH10163122A (ja) * 1996-11-29 1998-06-19 Fukui Shinetsu Sekiei:Kk 半導体ウエハの熱処理装置及び炉心管
FR2824663B1 (fr) * 2001-05-14 2004-10-01 Semco Sa Procede et dispositif de dopage, diffusion et oxydation pyrolithique de plaquettes de silicium a pression reduite

Also Published As

Publication number Publication date
KR900003251B1 (ko) 1990-05-12
KR880002240A (ko) 1988-04-29
JPS6317300A (ja) 1988-01-25

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